JPS6351346B2 - - Google Patents

Info

Publication number
JPS6351346B2
JPS6351346B2 JP13589080A JP13589080A JPS6351346B2 JP S6351346 B2 JPS6351346 B2 JP S6351346B2 JP 13589080 A JP13589080 A JP 13589080A JP 13589080 A JP13589080 A JP 13589080A JP S6351346 B2 JPS6351346 B2 JP S6351346B2
Authority
JP
Japan
Prior art keywords
locator
discharge lamp
glass tube
view
stem
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13589080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5763760A (en
Inventor
Takashi Fujimura
Kyoshi Saruwatari
Yoshifumi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13589080A priority Critical patent/JPS5763760A/ja
Priority to US06/306,714 priority patent/US4482842A/en
Publication of JPS5763760A publication Critical patent/JPS5763760A/ja
Publication of JPS6351346B2 publication Critical patent/JPS6351346B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008Production of exposure light, i.e. light sources
    • G03F7/70016Production of exposure light, i.e. light sources by discharge lamps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/82Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822High-pressure mercury lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
JP13589080A 1980-10-01 1980-10-01 Discharge lamp holding device Granted JPS5763760A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13589080A JPS5763760A (en) 1980-10-01 1980-10-01 Discharge lamp holding device
US06/306,714 US4482842A (en) 1980-10-01 1981-09-29 Curved tube type ultra high pressure mercury arc discharge lamp device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13589080A JPS5763760A (en) 1980-10-01 1980-10-01 Discharge lamp holding device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP15522990A Division JPH0465049A (ja) 1990-06-15 1990-06-15 放電灯

Publications (2)

Publication Number Publication Date
JPS5763760A JPS5763760A (en) 1982-04-17
JPS6351346B2 true JPS6351346B2 (en]) 1988-10-13

Family

ID=15162183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13589080A Granted JPS5763760A (en) 1980-10-01 1980-10-01 Discharge lamp holding device

Country Status (1)

Country Link
JP (1) JPS5763760A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2730790B2 (ja) * 1990-05-09 1998-03-25 東芝ライテック株式会社 低圧放電灯およびこれを用いた表示装置

Also Published As

Publication number Publication date
JPS5763760A (en) 1982-04-17

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